Novel ester compounds, polymers, resist compositions and patterning process
OwnerKoji Hasegawa, Takeshi Kinsho +1inventors
InventorsKoji Hasegawa, Takeshi Kinsho, Takeru Watanabe
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Abstract
Novel ester compounds having formula (1) wherein A1 is a polymerizable functional group having a double bond, A2 is furandiyl, tetrahydrofurandiyl or oxanorbornanediyl, R1 and R2 each are a monovalent hydrocarbon group, or R1 and R2 may bond together to form an aliphatic hydrocarbon ring with the carbon atom, and R3 is hydrogen or a monovalent hydrocarbon group which may contain a hetero atom are polymerizable into polymers. Resist compositions comprising the polymers are sensitive to high-energy radiation, have an improved sensitivity, resolution, and etching resistance, and lend themselves to micropatterning with electron beams or deep-UV rays.
Claims19
An ester compound having the general formula (1):
- wherein
- A1 is a polymerizable functional group having a carbon-to-carbon double bond,
- A2 is tetrahydrofurandiyl,
- R1 and R2 bond together to form an aliphatic hydrocarbon ring with the carbon atom to which they are bonded, and
- R3 is hydrogen or a straight, branched, or cyclic monovalent hydrocarbon group having 1 to 10 carbon atoms which may contain a hetero atom.
A polymer comprising recurring units of any one of the general formulae (1b) and (1c):
- wherein
- A2 is a divalent group selected from among furandiyl, and tetrahydrofurandiyl,
- R1 and R2 bond together to form an aliphatic hydrocarbon ring with the carbon atom to which they are bonded,
- R3 is hydrogen or a straight, branched, or cyclic monovalent hydrocarbon group having 1 to 10 carbon atoms which may contain a hetero atom, and
- k1 is 0 or 1.
An ester compound having the general formula:
- wherein
- A2 is tetrahydrofurandiyl,
- R1 and R2 bond together to form an aliphatic hydrocarbon ring with the carbon atom to which they are bonded,
- R3 is hydrogen or a straight, branched or cyclic monovalent hydrocarbon group having 1 to 10 carbon atoms which may contain a hetero atom, and
- R4 is hydrogen or methyl.
A polymer comprising recurring units of the general formula (1a):
- wherein
- A2 is a divalent group selected from among furandiyl and tetrahydrofurandiyl,
- R1 and R2 bond together to form an aliphatic hydrocarbon ring with the carbon atom to which they are bonded,
- R3 is hydrogen or a straight, branched or cyclic monovalent hydrocarbon group having 1 to 10 carbon atoms which may contain a hetero atom, and
- R4 is hydrogen or methyl.
An ester compound selected from the group consisting of compounds having any one of the following formulae:
Dependencies are inferred from the claim text.