Integrated electronic component

A process for targetedly producing single-walled carbon nanotubes (SWCNTs) and multi-walled carbon nanotubes (MWCNTs) on electrically conductive surfaces, comprising the steps of:

• (i) providing a substrate;
• (ii) forming a metal multilayer system at least on regions of the substrate by successively depositing a high-melting metal layer, a metal separating layer, and a catalyst layer;
• (iii) if appropriate, repeating step (ii) one or more times,
• wherein a final metal separating layer made of aluminum is additionally deposited over the catalyst layer on the metal multilayer system produced in step (ii) and/or (iii);
• (iv) depositing a nonconductive layer over the metal multilayer system produced in step (ii) and/or (iii);
• (v) producing at least one contact hole in the nonconductive layer, so that the metal multilayer system extends over the base of the contact hole produced at least in regions;
• and
• (vi) growing at least one nanotube on the metal multilayer system in the at least one contact hole.

A process for targetedly producing single-walled carbon nanotubes (SWCNTs) and multi-walled carbon nanotubes (MWCNTs) on electrically conductive surfaces, comprising the steps of:

• (i) providing a substrate;
• (ii) forming a metal multilayer system at least on regions of the substrate by successively depositing a high-melting metal layer, a metal separating layer, and a catalyst layer;
• (iii) depositing a final metal separating layer made of aluminum over the catalyst layer on the metal multilayer system produced in step (ii);
• (iv) depositing a nonconductive layer over the final metal separating layer;
• (v) producing at least one contact hole in the nonconductive layer, so that the metal multilayer system extends over the base of the contact hole produced at least in regions;
• and
• (vi) growing at least one nanotube on the metal multilayer system in the at least one contact hole.

A system for targetedly producing single-walled carbon nanotubes (SWCNTs) and multi-walled carbon nanotubes (MWCNTs) on electrically conductive surfaces, the system comprising:

• means for providing a substrate;
• means for forming a metal multilayer system at least on regions of the substrate by successively depositing a high-melting metal layer, a metal separating layer, and a catalyst layer;
• means for depositing a final metal separating layer made of aluminum over the catalyst layer on the metal multilayer system;
• means for depositing a nonconductive layer over the final metal separating layer;
• means for producing at least one contact hole in the nonconductive layer, so that the metal multilayer system extends over the base of the contact hole produced at least in regions;
• and
• means for growing at least one nanotube on the metal multilayer system in the at least one contact hole.