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US 2006/0234066 A1Published application
Topotactic anion exchange oxide films and method of producing the same
OwnerMark Zurbucheninventor
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Abstract
This invention disclosure describes methods for the fabrication of metal oxide films on surfaces by topotactic anion exchange, and laminate structures enabled by the method. A precursor metal-nonmetal film is deposited on the surface, and is subsequently oxidized via topotactic anion exchange to yield a topotactic metal-oxide product film. The structures include a metal-oxide layer(s) and/or a metal-nonmetal layer(s).
Claims19
A functional laminate structure, comprising:
- a substrate having a surface;
- a crystalline metal-nonmetal layer, comprising a metal and a nonmetal;
- and
- a crystalline metal-oxide layer, comprising a metal constituent, wherein
- the metal-nonmetal layer is selected from the group consisting of AX0.3, AX, AX2, AX3, and compounds consisting of combinations of said materials,
- the metal-oxide layer is topotactic with said metal-nonmetal layer;
- the metal constituents of the metal-oxide layer are those of the metal-nonmetal layer;
- and
- the metal-nonmetal layer is located between the surface and the metal-oxide layer.
6 more elements
A functional laminate structure, comprising:
- a substrate having a surface;
- a crystalline metal-nonmetal layer comprising a metal-nonmetal, the metal-nonmetal comprising a metal, wherein
- the metal-nonmetal is selected from the group consisting of:
- ABX3, An+1BnX3n+1, doped substituents thereof, anion-deficient versions thereof, and anion-excess versions thereof;
- and
- a crystalline metal-oxide layer comprising a metal-oxide, the metal-oxide comprising metal constituents, wherein
- the metal-oxide layer is topotactic with said metal-nonmetal layer;
- the metal constituents of the metal-oxide layer are those of the metal-nonmetal layer;
- the metal-oxide is selected from the group consisting of ABO3, An+1BnO3n+1, doped substituents thereof, anion-deficient versions thereof, and anion-excess versions thereof;
- and
- the crystalline metal-nonmetal layer is located between the surface and the metal-oxide layer.
8 more elements
Dependencies are inferred from the claim text.