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US 2006/0234042 A1Published application
Etched dielectric film in microfluidic devices
OwnerRui Yang, Nathan Kreutter +1inventors
InventorsRui Yang, Nathan Kreutter, Nanyakkara Somasiri
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Abstract
An etched dielectric film having an adhered etch stop layer for use in microfluidic devices. Channels, recesses, and other features can be etched into the films to make them suitable for use in microfluidic devices.
Claims30
An article comprising:
- a microfluidic device comprising (1) a dielectric film having a first surface and a second surface and comprising an etchable polymer, said dielectric film having an etched opening extending from said first surface to said second surface;
- and (2) an adjacent layer adhered to said second surface of said dielectric film, wherein said adhered layer is not etchable in the same manner as the dielectric layer.
A method comprising:
- providing a dielectric film having a first surface and a second surface and comprising an etchable polymer and having an adhered layer adjacent said second surface of said dielectric film;
- and
- etching an opening from said first surface to said second surface of said dielectric film wherein said adhered layer acts as an etch stop during the etching of said opening.
An article comprising:
- a microfluidic device comprising (1) a dielectric film having a first surface and a second surface and comprising a chemically etchable polymer selected from the group consisting of polyimides having carboxylic ester units in the polymeric backbone, liquid crystal polymers, and polycarbonates, said dielectric film having a chemically etched opening extending from said first surface to said second surface;
- and (2) an adhered layer adjacent said second surface of said dielectric film, wherein said adhered layer is not chemically etchable in the same manner as the dielectric layer.
A method comprising:
- providing a dielectric film having a first surface and a second surface and comprising a chemically etchable polymer selected from the group consisting of polyimides having carboxylic ester units in the polymeric backbone, liquid crystal polymers, and polycarbonates and having an adhered layer adjacent said second surface of said dielectric film;
- and
- chemically etching an opening from said first surface to said second surface of said dielectric film wherein said adhered layer acts as an etch stop during the chemical etching of said opening.
Dependencies are inferred from the claim text.