Micro movable element and optical switching device

A micro movable element, comprising:

• a micro movable substrate integrally formed with a plurality of micro movable units, each micro movable unit including a frame, a pivotally movable portion, a torsion connector connecting the frame and the movable portion to each other, and an actuator for generating a driving force for pivotal motion of the movable portion;
• a package base including an internal interconnect structure;
• and
• a plurality of electroconductive connectors provided between the micro movable substrate and the package base, each electroconductive connector electrically connecting the actuator of a corresponding one of the micro movable units to the internal interconnect structure.

A micro movable element, comprising:

• a plurality of micro movable substrates each integrally formed with a plurality of micro movable units, each micro movable unit including a frame, a pivotally movable portion, a torsion connector connecting the frame and the movable portion to each other, and an actuator for generating a driving force for pivotal motion of the movable portion;
• a package base including an internal interconnect structure;
• and
• a plurality of electroconductive connectors provided between the respective micro movable substrates and the package base, the connectors being provided to electrically connect the actuators of the respective micro movable units of each micro movable substrate to the internal interconnect structure.