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US 2006/0233433 A1Published application
Morphological inspection method based on skeletonization
AssigneeCamtek Ltd.
InventorsRoni Flieswasser, Moti Yanuka, Boris Dolgin
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Abstract
A morphological inspection method based on a comparison of real images—a real reference image and a real inspected image of an inspected object is disclosed.
Claims3
A morphological inspection method based on a comparison of real images—a real reference image and a real inspected image of an inspected object—said method comprising:
- a) creating a reference mask, said reference mask is comprised a first-color image and second-color image wherein:
- i) said first-color image is obtained from skeletonization of said reference real image, having a skeletons image;
- and
- ii) said second-color image is obtained from skeletonization of an inversion of said reference image, having an edges-skeletons image;
- b) painting said inspected image in a third color and:
- (i) performing logical functions using said first-color image and said third-color inspected image, having first-defects-image;
- and
- (ii) performing logical functions using said second-color image and said third-color inspected image, having second-defects-image;
- and
- c) combining said first-defects-image with said second-defects-image, having an inspection-defects-image or defects-map.
7 more elements
Dependencies are inferred from the claim text.