Device and method for supplying short-wavelength light
AssigneeLeica Microsystems CMS GmbH
InventorMichael Heiden
Life of this patent
Estimating the term…
Abstract
The present invention broadly comprises a device for supplying light at an illumination wavelength shorter than 300 nm. The device includes a first subassembly, having a light source for delivering light at a wavelength that is at least twice as long as the illumination wavelength; a second subassembly having at least one means for wavelength reduction; and a light guide that guides the light from the light source of the first subassembly into the second subassembly. The present invention also broadly comprises a method for supplying light at an illumination wavelength shorter than 300 nm.
Claims9
A device for supplying short-wavelength light at an illumination wavelength shorter than 300 nm, comprising:
- a first subassembly, having a light source for delivering light at a wavelength that is at least twice as long as the illumination wavelength;
- a second subassembly having at least one means for wavelength reduction;
- and a light guide that guides the light from the light source of the first subassembly into the second subassembly.
A method for supplying light at an illumination wavelength shorter than 300 nm comprises the steps of:
- providing a light source for delivering light at a wavelength that is at least twice as long as the illumination wavelength,
- delivering the light from a first subassembly to a second subassembly via a light guide;
- and,
- generating in the second subassembly an illumination wavelength shorter than 300 nm, wherein the second subassembly comprises at least one means for wavelength reduction.
Dependencies are inferred from the claim text.