Slider and manufacturing method thereof, head gimbal assembly, disk drive with same

A manufacturing method of slider, the slider comprising a substrate and an incline portion, said incline portion being disposed with an convex configuration on an air bearing surface opposite to a recording medium of the substrate, said incline portion connecting a write element which writes information to said recording medium with a concave portion of the air bearing surface, where airflow flows in when the recording medium rotates, an angle of more than 90 degree being formed between a line and surface of the read/write portion, the line connecting the read/write portion and the concave portion, the manufacturing method comprising steps of:

• a step of forming a protective layer on the substrate, said substrate having the read/write portion formed thereon;
• a step of forming a first incline portion by etching the substrate incorporating the protective layer by reactive ion etching method with a first reactive gas containing CF4 introduced therein, said first incline portion being formed between the substrate and bottom position at one end of the protective layer where airflow comes in, said first incline portion being with substantially linear shape and connected to a surface the read/write portion;
• a step of depositing coatings on the substrate incorporating the first incline portion by reactive ion etching method with a second reactive gas containing CF4 and C2H2, said coatings are formed on the first incline portion and surface of the substrate, said surface of the substrate being adjacent the first incline portion and extending along a direction away from the protect layer;
• a step of forming a second incline portion by etching the substrate incorporating the coating by reactive ion etching method with the second reactive gas introduced therein, the second incline portion being with substantially linear shape and connected to the concave portion and surface thereof, the second incline portion making an incline angle between itself and the concave portion, the incline angle being smaller than another incline angle formed the first incline portion and the concave portion.