Catoptric objectives and systems using catoptric objectives
AssigneeCarl Zeiss SMT GmbH
InventorsHans-Jurgen Mann, David Shafer, Wilhelm Ulrich
Life of this patent
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Abstract
In general, in one aspect, the invention features an objective arranged to image radiation from an object plane to an image plane, including a plurality of elements arranged to direct the radiation from the object plane to the image plane, wherein the objective has an image side numerical aperture of more than 0.55 and a maximum image side field dimension of more than 1 mm, and the objective is a catoptric objective.
Claims62
An objective arranged to image radiation from an object plane to an image plane, comprising:
- a plurality of elements arranged to direct the radiation from the object plane to the image plane,
- wherein the objective has an image side numerical aperture of more than 0.55 and a maximum image side field dimension of more than 1 mm, and the objective is a catoptric objective.
An objective arranged to image radiation from an object plane to an image plane, comprising:
- a plurality of elements arranged to direct the radiation from the object plane to the image plane,
- wherein the objective has an image side numerical aperture of more than 0.55, a distance between the object plane and the image plane is less than 2 m, and the objective is a catoptric objective.
An objective arranged to image radiation of wavelength λ from an object plane to an image plane, comprising:
- a plurality of mirrors arranged to direct the radiation from the object plane to the image plane,
- wherein the objective has an image side numerical aperture of more than 0.55 and a maximum image side field dimension of more than 1 mm, and λ is about 100 nm or less.
An objective arranged to image radiation from an object plane to an image plane, comprising:
- a plurality of elements arranged to direct the radiation from the object plane to the image plane, the plurality of elements including a first element, a second element, and a third element, where each of the first, second, and third elements have an opening for passage of the radiation from the object plane to the image plane,
- wherein the objective has an image side numerical aperture of more than 0.55 and the objective is a catoptric objective.
An objective arranged to image radiation from an object plane to an image plane, comprising:
- a plurality of elements arranged to direct the radiation from the object plane to the image plane, the plurality of elements including a first element and the first element does not have an opening,
- wherein the objective has an image side numerical aperture of more than 0.55, and the objective is a catoptric objective.
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An objective arranged to image radiation from an object plane to an image plane, comprising:
- a plurality of elements arranged to direct the radiation from the object plane to the image plane, the plurality of elements including a first element and the first element has an opening for passage of the radiation from the object plane to the image plane,
- wherein the objective has an image side numerical aperture of more than 0.55 and the objective is a catoptric objective.
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Dependencies are inferred from the claim text.