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US 2006/0232866 A1Published application
Optical unit and exposure apparatus having the same
AssigneeCanon Kabushiki Kaisha
InventorsChoshoku Sai, Shigeo Sakino, Katsumi Asada, Hirohito Ito, Shinji Uchida
Life of this patent
Estimating the term…
Abstract
An optical unit includes a plate having a fixed position, an optical element having a specific optical action, a fixing device for partially fixing the optical element, and a deforming device, located between the plate and the optical element, for applying a deforming force to the optical element to asymmetrically change a surface shape of the optical element.
Claims10
An optical unit comprising:
- a plate having a fixed position;
- an optical element having a specific optical action;
- a fixing device for partially fixing said optical element;
- and
- a deforming device, located between said plate and said optical element, for applying a deforming force to the optical element to asymmetrically change a surface shape of the optical element.
2 more elements
An optical unit comprising:
- an optical element having a specific optical action;
- a deforming device for applying a deforming force to said optical element to change a surface shape of said optical element;
- and
- a controller for controlling the deforming force of said deforming device such that at least part of said optical element is not displaced, when said deforming device applies deforming force to said optical element.
1 more element
Dependencies are inferred from the claim text.