Liquid ejection head, method of manufacturing same, and image forming apparatus
AssigneeFuji Photo Film Co., Ltd.
InventorHiroshi Ota
Life of this patent
Estimating the term…
Abstract
The method manufactures a liquid ejection head having a diaphragm which forms a portion of pressure chambers connected to nozzles ejecting liquid, and piezoelectric elements which deform the diaphragm. The method comprises the steps of: applying a photosensitive resin on at least a portion of each of electrodes of the piezoelectric elements; bonding a substrate having through holes, to the photosensitive resin; exposing the photosensitive resin via the through holes; developing the exposed photosensitive resin, thereby forming holes connecting to the through holes in the photosensitive resin; and filling conductive material into the through holes and the holes formed in the photosensitive resin.
Claims5
A method of manufacturing a liquid ejection head having a diaphragm which forms a portion of pressure chambers connected to nozzles ejecting liquid, and piezoelectric elements which deform the diaphragm, the method comprising the steps of:
- applying a photosensitive resin on at least a portion of each of electrodes of the piezoelectric elements;
- bonding a substrate having through holes, to the photosensitive resin;
- exposing the photosensitive resin via the through holes;
- developing the exposed photosensitive resin, thereby forming holes connecting to the through holes in the photosensitive resin;
- and
- filling conductive material into the through holes and the holes formed in the photosensitive resin.
A liquid ejection head, comprising:
- a diaphragm which forms a portion of pressure chambers connected to nozzles ejecting liquid;
- piezoelectric elements which deform the diaphragm;
- a photosensitive resin which is applied on at least a portion of each of electrodes of the piezoelectric elements;
- a substrate having through holes which is bonded to the photosensitive resin on a side reverse to a side adjacent to the piezoelectric elements;
- and
- wires which pass through the substrate and the photosensitive resin, and connect electrically to the electrodes of the piezoelectric elements.
Dependencies are inferred from the claim text.