Piezoelectric element, liquid-jet head and liquid-jet apparatus
AssigneeSeiko Epson Corporation
InventorsKoji Sumi, Hironobu Kazama
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Abstract
Disclosed are a piezoelectric element which can obtain a large strain with a low drive voltage, a liquid-jet head and a liquid-jet apparatus. The piezoelectric element includes: a lower electrode; an upper electrod; and a piezoelectric film which is made of lead zirconate titanate (PZT), and which has perovskite crystals having priority orientations of the (100) plane, the piezoelectric film being interposed between the lower electrode and the upper electrode. In the piezoelectric element, an X-ray diffraction peak position derived from the (100) planes of the piezoelectric film is within a range of 2θ=21.79 to 21.88.
Claims9
A piezoelectric element comprising:
- a lower electrode;
- an upper electrode;
- and
- a piezoelectric film which is made of lead zirconate titanate (PZT), and which has perovskite crystal shaving priority orientations of the (100) plane, the piezoelectric film being interposed between the lower electrode and the upper electrode, wherein an diffraction peak position of X-ray derived from the (100) planes of the piezoelectric film is within a range of 2θ=21.79 to 21.88 degrees.
Dependencies are inferred from the claim text.