Back to results
US 2006/0232638 A1Published application
Actuator, liquid drop discharge head, ink cartridge, inkjet recording device, micro pump, optical modulation device, and substrate
AssigneeRicoh Company, Ltd.
InventorsTakahiko Kuroda, Shuya Abe
Life of this patent
Estimating the term…
Abstract
An actuator includes a vibration plate area displaced by an electrostatic force, and electrodes facing each other via a first space in the vibration plate area The first space is formed by a sacrificial layer process using a sacrificial layer removing hole. A barrier as a fluid resistance is formed between the first space and a second space situated in the vicinity of the sacrificial layer removing hole.
Claims10
An actuator, comprising:
- a vibration plate area displaced by an electrostatic force;
- and
- electrodes facing each other via a first space in the vibration plate area;
- wherein the first space is formed by a sacrificial layer process using a sacrificial layer removing hole;
- and
- a barrier as a fluid resistance is formed between the first space and a second space situated in the vicinity of the sacrificial layer removing hole.
3 more elements
A liquid drop discharge head, comprising:
- a discharging room which discharges a liquid drop and is connected to a nozzle;
- a common liquid room receiving discharge fluid supplied to the discharging room;
- a pressure generating part configured to give discharging energy to the discharge fluid in the discharging room and thereby the discharge fluid can be discharged from the nozzle;
- a plurality of actuators, the actuator including
- a vibration plate working as the pressure generating part;
- a vibration plate area displaced by an electrostatic force;
- and
- electrodes facing each other via a first space in the vibration plate area;
- wherein the first space is formed by a sacrificial layer process using a sacrificial layer removing hole;
- and
- a barrier as a fluid resistance is formed between the first space and a second space situated in the vicinity of the sacrificial layer removing hole.
8 more elements
An ink cartridge, comprising:
- a liquid drop discharge head configured to discharge an ink drop;
- and
- a ink tank configured to supply ink to the liquid drop discharge head;
- wherein the liquid drop discharge head, includes
- a discharging room which discharges a liquid drop and is connected to a nozzle;
- a common liquid room receiving discharge fluid supplied to the discharging room;
- a pressure generating part configured to give a discharging energy to the discharge fluid in the discharging room and thereby the discharge fluid can be discharged from the nozzle;
- a plurality of actuators, the actuator including
- a vibration plate working as the pressure generating part;
- a vibration plate area displaced by an electrostatic force;
- and
- electrodes facing each other via a first space in the vibration plate area;
- wherein the first space is formed by a sacrificial layer process using a sacrificial layer removing hole;
- and
- a barrier as a fluid resistance is formed between the first space and a second space situated in the vicinity of the sacrificial layer removing hole.
12 more elements
An ink jet recording device, comprising:
- a liquid drop discharge head configured to discharge an ink drop;
- wherein the liquid drop discharge head, includes
- a discharging room which discharges a liquid drop and is connected to a nozzle;
- a common liquid room receiving discharge fluid supplied to the discharging room;
- a pressure generating part configured to give discharging energy to the discharge fluid in the discharging room and thereby the discharge fluid can be discharged from the nozzle;
- a plurality of actuators, the actuator including
- a vibration plate working as the pressure generating part;
- a vibration plate area displaced by an electrostatic force;
- and
- electrodes facing each other via a first space in the vibration plate area;
- wherein the first space is formed by a sacrificial layer process using a sacrificial layer removing hole;
- and
- a barrier as a fluid resistance is formed between the first space and a second space situated in the vicinity of the sacrificial layer removing hole.
10 more elements
A micro pump transporting liquid based on displacement of a vibration plate, comprising:
- at least two pairs of electrodes having a fixed electrode and a movable electrode functioning as the vibration plate;
- and
- a structural part configured to displace the vibration plate based on an electrostatic force acting the electrodes;
- wherein the vibration plate is displaced by an actuator, the actuator including:
- a vibration plate area displaced by an electrostatic force;
- and
- electrodes facing each other via a first space in the vibration plate area;
- wherein the first space is formed by a sacrificial layer process using a sacrificial layer removing hole;
- and
- a barrier as a fluid resistance is formed between the first space and a second space situated in the vicinity of the sacrificial layer removing hole.
7 more elements
An optical modulation device changing a reflection direction of light based on displacement of a mirror, comprising:
- at least two pairs of electrodes having a fixed electrode and a movable electrode which is connected to a vibration plate and is provided in parallel;
- and
- a structural part configured to displace the mirror based on displacement of the vibration plate by using an electrostatic force acting on the electrodes;
- wherein the vibration plate is displaced by an actuator, the actuator including
- a vibration plate area displaced by an electrostatic force;
- and
- electrodes facing each other via a first space in the vibration plate area;
- wherein the first space is formed by a sacrificial layer process using a sacrificial layer removing hole;
- and
- a barrier as a fluid resistance is formed between the first space and a second space situated in the vicinity of the sacrificial layer removing hole.
7 more elements
A substrate having a structure, comprising:
- a space which is formed by a sacrificial layer process using a sacrificial layer removing hole and which is provided inside of the substrate;
- and
- a barrier as a fluid resistance formed between the space and the sacrificial layer removing hole.
Dependencies are inferred from the claim text.