MEMS device with movement amplifying actuator

Abstract

A micro-electromechanical liquid ejection device includes a substrate that defines a liquid inlet channel. Drive circuitry is positioned on the substrate. A nozzle chamber structure is positioned on the substrate and defines a nozzle chamber in fluid communication with the liquid inlet channel and a liquid ejection port in fluid communication with the nozzle chamber. A liquid ejecting mechanism is operatively arranged with respect to the nozzle chamber such that movement of the liquid ejecting mechanism results in the ejection of liquid from the liquid ejection port. An actuator is fast with the substrate and is connected to the drive circuitry to be displaced relative to the substrate on receipt of an electrical signal from the drive circuitry. The actuator is connected to the liquid ejecting mechanism to cause said movement of the liquid ejecting mechanism. The liquid ejecting mechanism has a liquid ejecting member that acts on liquid in the nozzle chamber. The actuator and the liquid ejecting mechanism are configured so that an extent of displacement of the actuator is amplified in movement of the liquid ejecting member.

Dependencies are inferred from the claim text.