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US 2006/0232471 A1Published application
Phase and frequency control of a radio frequency generator from an external source
AssigneeMKS Instruments, Inc.
InventorDavid Coumou
Life of this patent
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Abstract
Controlling a phase and/or a frequency of a RF generator. The RF generator includes a power source, a sensor, and a sensor signal processing unit. The sensor signal processing unit is coupled to the power source and to the sensor. The sensor signal processing unit controls the phase and/or the frequency of a RF generator.
Claims22
A radio frequency (RF) generator comprising:
- a RF power source;
- a sensor coupled to the power source;
- a sensor signal processing unit coupled to the power source and to the sensor, the sensor signal processing unit adapted to receive an input from an external RF generator source and to generate a control signal to control phase and frequency of the RF generator.
A radio frequency (RF) system comprising:
- a first agile frequency RF generator including:
- a power source;
- a sensor coupled to the power source;
- and
- a sensor signal processing unit coupled to the power source and to the sensor, the sensor signal processing unit adapted to receive an input from an external source and to generate a first control signal controlling at least one of a first phase and a first frequency of a RF power signal from the first RF generator;
- and
- a second agile frequency RF generator operable to receive a second control signal from the first RF generator, the second control signal controls at least one of a second phase and a second frequency of the second RF generator.
4 more elements
A RF system comprising:
- a first RF generator;
- and
- a second RF generator coupled to the first RF generator, the first and the second RF generators each including:
- a power source;
- a sensor coupled to the power source;
- a sensor signal processing unit coupled to the power source and to the sensor, wherein the sensor signal processing unit for the first RF generator controls a phase and a frequency of the first RF generator and the sensor signal processing unit for the second RF generator control a phase and a frequency of the second RF generator.
3 more elements
A method comprising:
- coupling a sensor to a power source;
- coupling a sensor signal processing unit to the power source and to the sensor;
- receiving an input from an external source;
- and
- generating a control signal to control phase and frequency of a RF generator.
2 more elements
Dependencies are inferred from the claim text.