Safety monitoring mechanism of a wafer fabrication platform
AssigneeWelltech Semiconductor Inc.
InventorYu-Hung Huang
Life of this patent
Estimating the term…
Abstract
A safety monitoring mechanism of a wafer fabrication platform is disclosed. The mechanism comprises a vibration sensor mounted at the loading apparatus of the wafer fabrication platform for detecting vibration generated during the operation of the loading apparatus; a determination module for receiving the vibration detected by the vibration sensor and to convert the vibration into digital signals and for contrast analysis with the preset standard signal range; and an alarm apparatus which produces an alarm signal to operator when the detected digital signal by the vibration sensor exceeds the standard signal range for being abnormal after contrast analysis with that of the module.
Claims31
1-12. (canceled)
A safety monitoring mechanism for wafer fabrication platform comprising:
- a vibration sensor mounted at the loading apparatus of the wafer fabrication platform for detecting vibration generated during the operation of the loading apparatus;
- a determination module for receiving the vibration detected by the vibration sensor and to convert the vibration into digital signals and for contrast analysis with the preset standard signal range;
- and
- an alarm apparatus which produces an alarm signal to operator when the detected digital signal by the vibration sensor exceeds the standard signal range for being abnormal after contrast analysis with that of the module.
A safety monitoring mechanism for wafer fabrication platform comprising:
- a sound sensor mounted at the loading apparatus of the wafer fabrication platform for detecting vibration generated during the operation of the loading apparatus;
- a determination module for receiving the sound detected by the sound sensor and to convert the sound into digital signals and for contrast analysis with the preset standard signal range;
- and
- an alarm apparatus which produces an alarm signal to operator when the detected digital signal by the sound sensor exceeds the standard signal range for being abnormal after contrast analysis with that of the module.
A safety monitoring mechanism for wafer fabrication platform comprising:
- a deformation sensor mounted at the loading apparatus of the wafer fabrication platform for detecting vibration generated during the operation of the loading apparatus;
- a determination module for receiving the deformation detected by the deformation sensor and to convert the deformation into digital signals and for contrast analysis with the preset standard signal range;
- and
- an alarm apparatus which produces an alarm signal to operator when the detected digital signal by the deformation sensor exceeds the standard signal range for being abnormal after contrast analysis with that of the module.
A safety monitoring mechanism for wafer fabrication platform comprising:
- a vibration sensor mounted at the loading apparatus of the wafer fabrication platform for detecting vibration generated during the operation of the loading apparatus;
- a sound sensor mounted at the loading apparatus of the wafer fabrication platform for detecting vibration generated during the operation of the loading apparatus;
- an alarm apparatus which produces an alarm signal to operator when the detected digital signal by the deformation sensor exceeds the standard signal range for being abnormal after contrast analysis with that of the module;
- a determination module for receiving the vibration detected by the vibration sensor and to convert the vibration into digital signals and for contrast analysis with the preset standard signal range;
- and
- an alarm apparatus which produces an alarm signal to operator when the detected digital signal by the vibration sensor exceeds the standard signal range for being abnormal after contrast analysis with that of the module.
Dependencies are inferred from the claim text.