Device for inspecting element substrates and method of inspection using this device
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorMasaaki Hiroki
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Abstract
A light-emitting device is produced at a decreased cost by inspecting defects in the pixels in the step of fabrication. TFTs possessed by the pixels on the element substrate and TFTs possessed by the peripheral drive circuits are inspected by using the inspection device to detect defects in a step in a process for finishing the light-emitting device. This makes it possible to decrease the loss that results when the defective products are processed through up to the final step, and to improve the yield by repairing the defective products in a step of repairing.
Claims1
A device for inspecting element substrates comprising a source of electromagnetic waves and an opposing detector substrate, the source of electromagnetic waves ionizing a gas present between the opposing detector substrate and an element substrate that is to be inspected,
- wherein the opposing detector substrate has a TFT and an electrode connected to the TFT.
Dependencies are inferred from the claim text.