Spacers for field emission displays
AssigneeMicron Technology, Inc.
InventorsDavid Cathey, James Alwan
Life of this patent
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Abstract
The disclosed method for forming a field emission display includes forming a cathode and an anode, forming a plurality of photoresist posts over the cathode, and coating the posts with a layer of coating material. The layer of coating material forms sidewalls around the posts. The photoresist posts may then be removed from within the sidewalls. The anode may then be fitted onto the sidewalls so that the sidewalls function as spacers in the field emission display.
Claims23
A field emission device structure, comprising:
- a baseplate;
- a faceplate spaced apart from the baseplate:
- and
- a plurality of spacers extending from the baseplate to the faceplate, wherein each of the plurality of spacers comprises a column of vacuum compatible material.
A field emission display, comprising:
- a cathode comprising a plurality of emitters;
- an anode spaced apart from the cathode;
- and
- a plurality of photoresist spacers extending from the cathode to the anode.
A field emission display, comprising:
- a cathode comprising a plurality of emitters;
- an anode spaced apart from the cathode;
- and
- a plurality of spacers extending from the cathode to the anode, wherein each of the plurality of spacers comprises:
- a column of photoresist core material having a first end in contact with the cathode, a second end, and longitudinal sides between the first end and the second end;
- and
- a vacuum compatible material surrounding the longitudinal side and the second end of the column of photoresist core material.
A method of forming a field emission display, comprising:
- forming a cathode, the cathode including a plurality of emitters;
- forming a plurality of posts over the cathode, the plurality of posts comprising a photoresist material;
- and
- forming an anode and spacing the anode apart from the cathode, the plurality of posts extending from the cathode to the anode.
Dependencies are inferred from the claim text.