System for cooling motors
AssigneeNikon Corporation
InventorsMichael Binnard, Yoichi Arai, Andrew Hazelton
Life of this patent
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Abstract
A system for cooling motors of a lithographic tool. The system includes a core plate having a plurality of outward extending cores. A cover is joined to the core plate or the plurality of outward extending cores, which forms at least one flow path for coolant to remove heat from coils of the motor.
Claims37
A system for adjusting a temperature of a motor, comprising:
- a core plate having a plurality of outward extending cores;
- and
- a cover, joined to the core plate or the plurality of outward extending cores, forming at least one flow path for fluid to adjust a temperature of the motor.
The system of 10, wherein the partial enclosure comprises sidewalls and endwalls, an inlet is provided in one of the endwalls and an outlet is provided in an opposing one of the endwalls to provide ingress and egress of the fluid to and away the flow path.
A motor assembly, comprising:
- a core plate having outward extending cores and coils surrounding each of the outward extending cores;
- a cover joined to the core plate or the outward extending cores to form at least one channel which provides a fluid path for fluid to adjust a temperature of the coils;
- a magnetic assembly aligned with the outward extending cores;
- and
- a thermoelectric device adjusting a temperature of the fluid.
An exposure apparatus, comprising:
- an illumination system that irradiates radiant energy on a substrate retained by a stage device;
- at least one motor assembly that moves the stage device;
- and
- a system for adjusts the temperature of the at least one motor, the system including at least one flow path, formed by a cover, which provides a fluid path for fluid to adjust a temperature of coils of the at least one motor assembly.
Dependencies are inferred from the claim text.