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US 2006/0231898 A1Published application
CMOS image sensor and method of manufacturing the same
AssigneeSamsung Electronics Co., Ltd.
InventorsHee-Geun Jeong, Jae-Seob Roh, Seok-Ha Lee
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Abstract
Provided are a CMOS image sensor and a method of manufacturing the same. The CMOS image sensor includes a semiconductor substrate having photodiodes and transistors. An interlayer insulating layer is formed on the resultant structure having the photodiodes and transistors, and light blocking patterns are formed on the interlayer insulating layer to surround the peripheries of the photodiodes.
Claims52
A CMOS image sensor comprising:
- a semiconductor substrate having photodiodes and transistors;
- an interlayer insulating layer formed on the resultant structure having the photodiodes and transistors;
- and
- light blocking patterns formed on the interlayer insulating layer, and surrounding peripheries of the photodiodes.
1 more element
A CMOS image sensor comprising:
- a semiconductor substrate having photodiodes and transistors;
- an interlayer insulating layer formed on the resultant structure having the photodiodes and transistors;
- molding portions formed on the interlayer insulating layer, and composed of an light blocking material to surround peripheries of the photodiodes;
- a floatable oxide layer formed on the interlayer insulating layer having the molding portions, and having indented portions formed by steps of the molding portions;
- and
- inner lenses formed within the indented portions of the floatable oxide layer.
3 more elements
A CMOS image sensor comprising:
- a semiconductor substrate including a plurality of unit pixels having photodiodes and transistors;
- an interlayer insulating layer formed on the semiconductor substrate;
- molding portions formed on an upper surface of the interlayer insulating layer, and surrounding the photodiodes per unit pixels;
- a floatable oxide layer formed on an upper surface of the interlayer insulating layer, and having indented portions defined by the molding portions;
- inner lenses respectively formed in the indented portions;
- and
- R, G and B color filters formed on an upper surface of the semiconductor substrate having the inner lenses, and arranged under a prescribed rule to correspond to the inner lenses,
- wherein the molding portions are formed to allow areas of the photodiode regions exposed by the molding portions to be increased in order of the R, G and B filters, thereby increasing apertures and curvatures of the inner lenses in order of the R, G and B filters.
5 more elements
A method of manufacturing a CMOS image sensor comprising:
- providing a semiconductor substrate having photodiodes and transistors;
- forming an interlayer insulating layer on an upper surface of the resultant structure having photodiodes and transistors;
- forming molding portions on the interlayer insulating layer to surround the peripheries of the photodiodes;
- and
- forming a floatable oxide layer on the interlayer insulating layer having the molding portions, and having indented portions corresponding to the photodiodes.
2 more elements
Dependencies are inferred from the claim text.