Method of treating inorganic oxide film, electronic device substrate, method of manufacturing electronic device substrate, liquid crystal panel, and electronic apparatus
AssigneeSeiko Epson Corporation
InventorsYuji Shinohara, Koichi Terao
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Abstract
A method of treating an inorganic oxide film includes: dipping an inorganic oxide film having a plurality of pores therein which is formed by an oblique deposition method into a treatment liquid containing alcohol; reducing pressure of a space where the treatment liquid is provided to infiltrate the treatment liquid into the pores of the inorganic oxide film; and chemically bonding the alcohol to a surface of the inorganic oxide film and inner surfaces of the pores.
Claims9
A method of treating an inorganic oxide film comprising:
- dipping an inorganic oxide film having a plurality of pores therein which is formed by an oblique deposition method into a treatment liquid containing alcohol;
- reducing pressure of a space where the treatment liquid is provided to infiltrate the treatment liquid into the pores of the inorganic oxide film;
- and
- chemically bonding the alcohol to a surface of the inorganic oxide film and inner surfaces of the pores.
An electronic device substrate comprising:
- a substrate;
- and
- an alignment film which is formed on a surface of the substrate,
- wherein the alignment film is formed by chemically bonding alcohol to a surface of an inorganic oxide film having a plurality of pores therein which is formed by an oblique deposition method and inner surfaces of the pores.
A method of manufacturing an electronic device substrate including a substrate and an alignment film formed on a surface of the substrate, comprising:
- forming an inorganic oxide film having a plurality of pores therein on the surface of the substrate by an oblique deposition method;
- dipping the substrate having the inorganic oxide film formed thereon into a treatment liquid containing alcohol;
- reducing pressure of a space where the treatment liquid is provided to infiltrate the treatment liquid into the pores of the inorganic oxide film;
- and
- chemically bonding the alcohol to a surface of the inorganic oxide film and inner surfaces of the pores to form the alignment film.
Dependencies are inferred from the claim text.