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US 2006/0231823 A1Published application
Structure for amorphous carbon based non-volatile memory
AssigneeMicron Technology, Inc.
InventorsJohn Moore, Kristy Campbell, Joseph Brooks
Life of this patent
Estimating the term…
Abstract
A memory device including at least one first memory element comprising a first layer of amorphous carbon over at least one second memory element comprising a second layer of amorphous carbon. The device also includes at least one first conductive layer common to the at least one first and the at least one second memory elements.
Claims39
1-67. (canceled)
A method of forming a memory device, the method comprising the acts of:
- forming at least one first memory element, the act of forming the at least one first memory element comprising forming a first layer of amorphous carbon and forming at least one first conductive layer;
- forming at least one second memory element over the at least one first memory element, the act of forming the at least one second memory element comprising forming a second layer of amorphous carbon and forming the at least one first conductive layer.
A method of forming a memory device, the method comprising the acts of:
- forming a first conductive line over a substrate;
- forming a plurality of first conductive plugs over the first conductive line;
- forming a first amorphous carbon layer over the plurality of first conductive plugs;
- forming a plurality of first silver lines over the first amorphous carbon layer;
- forming a second amorphous carbon layer over the plurality of silver lines;
- forming a plurality of second conductive plugs over the second amorphous carbon layer;
- and
- forming a second conductive line over the plurality of second conductive plugs.
5 more elements
A method of forming a memory device, the method comprising the acts of:
- forming a first conductive line over a substrate;
- forming a plurality of first conductive plugs switchably connected to the first conductive line;
- forming a first amorphous carbon layer over the plurality of first conductive plugs;
- forming a first silver layer over the first amorphous carbon layer;
- forming a second amorphous carbon layer over the first silver layer;
- forming a plurality of second conductive plugs over the second amorphous carbon layer;
- and
- forming a second conductive line switchably connected to the plurality of second conductive plugs.
5 more elements
Dependencies are inferred from the claim text.