Method and apparatus for specimen fabrication

A specimen fabrication apparatus comprising:

• an ion source;
• an optical system for irradiating an ion bean emitted from the ion source via a patterning mask, to fabricate a micro-specimen from a sample;
• a probe for separating the micro-specimen from the sample,
• a specimen holder to mount the micro-specimen.

A specimen fabrication apparatus comprising:

• an ion source;
• an optical system for irradiating an ion beam emitted from the ion source via a patterning mask, to fabricate a micro-specimen from a sample;
• a probe for separating the micro-specimen from the sample,
• a specimen holder to mount the micro-specimen, and
• an electron-beam irradiating optical system for irradiating an electron beam to the sample.

A specimen fabrication apparatus comprising:

• an irradiating optical system to irradiate a sample with a projection ion beam,
• a sample stage to mount the sample,
• a vacuum specimen chamber to contain the sample stage,
• a specimen holder in the vacuum specimen chamber to mount a micro-specimen which is extracted from the sample by the irradiation of the projection ion beam, and
• a transferring means to mount the micro-specimen to the specimen holder.