Charged particle beam device with cleaning unit and method of operation thereof
AssigneeICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
InventorThomas Jasinski
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Abstract
The invention provides a charged particle beam device, an emitter module for emitting charged particle beams and a method of operation thereof. Thereby, a charged particle beam emitter (15) emitting charged particles along an optical axis (1) is realized. On the same carrier body (32), a cleaning emitter (16) for emitting charged particles approximately along the optical axis (1) is realized. Thus, an improved cleaning can be provided.
Claims15
An emitter module for emitting charged particle beams, comprising
- a carrier body comprising an insulating material;
- a charged particle beam emitter emitting charged particles along an optical axis, wherein the charged particle emitter is mechanically connected to the carrier body;
- a cleaning emitter for emitting charged particles approximately along the optical axis, wherein the cleaning emitter is mechanically connected to the carrier body.
A charged particle device for emitting charged particle beams, comprising
- an emitting module having
- a carrier body comprising an insulating material;
- a charged particle beam emitter emitting charged particles along an optical axis, wherein the charged particle emitter is mechanically connected to the carrier body;
- a cleaning emitter for emitting charged particles approximately along the optical axis, wherein the cleaning emitter is mechanically connected to the carrier body;
- a beam shaping aperture;
- and
- an objective lens for focusing the charged particle beam onto a specimen.
A method of cleaning and operating a charged particle device, comprising:
- a) emitting charged particles approximately along an optical axis with a cleaning emitter, wherein the cleaning emitter is located within a gun chamber of the charged particle device;
- b) pumping molecules, atoms and ions out of the charged particle device;
- and
- c) emitting charged particles onto a specimen along the optical axis with a charged particle emitter, wherein the charged particle emitter is located within the gun chamber of the charged particle device.
Dependencies are inferred from the claim text.