Computer Program Products for Measuring Critical Dimensions of Fine Patterns Using Scanning Electron Microscope Pictures and Secondary Electron Signal Profiles

A computer program product that is configured to inspect a pattern, the computer program product comprising a computer usable storage medium having computer-readable program code embodied in the mediums the computer-readable program code comprising:

• computer-readable program code that is configured to acquire a scanning electron microscope picture of an inspection pattern;
• computer-readable program code that is configured to acquire a scanning electron microscope secondary electron signal profile of the inspection pattern;
• and
• computer-readable program code that is configured to determine whether the inspection pattern is defective by comparing the scanning electron microscope picture of the inspection pattern to a scanning electron microscope picture of a sample pattern and by comparing the scanning electron microscope secondary electron signal profile of the inspection pattern to a scanning electron microscope secondary electron signal profile of a sample pattern.