Crystallographic metrology and process control

A system for inline crystallographic metrology comprising:

• a sample holder for holding a crystalline sample;
• a first ion source for generating a first ion beam;
• a scanning actuator for controlling the relative movement between the first ion beam and the crystalline sample, the scanning actuator being controllable for directing the first ion beam at desired areas of the crystalline sample;
• an electron detector for detecting secondary electrons emitted from the crystalline sample;
• a first processing system for creating a contrast intensity image based upon secondary electron emissions from the crystalline sample;
• a second processing system programmed to provide crystallographic information based on the contrast image intensity data;
• and
• a controller for controlling the scanning actuator for scanning the first ion beam.

A system for inline crystallographic metrology comprising:

• a sample holder for holding a crystalline sample;
• a first ion source for generating a first ion beam;
• an electron source for generating an electron beam;
• a scanning actuator for controlling the relative movement between the first ion beam, the electron beam, and the crystalline sample, the scanning actuator being controllable for directing the first ion beam at desired areas of the crystalline sample and for directing the electron beam at a series of points within the sample area;
• an electron detector for detecting secondary electron emissions from the crystalline sample;
• a first processing system for creating a contrast intensity image based upon secondary electron emissions from the crystalline sample and generating crystallographic data based upon electron diffraction from the crystalline sample;
• a second processing system programmed to provide crystallographic information based on the contrast image intensity data and configured for determining whether sufficient data have been acquired to characterize the sample area;
• and
• a controller for controlling the scanning actuator to direct the first ion beam at desired areas such that each ion channeling image is representative of channeling directions within the crystalline sample and to space the points apart such that acquired data is representative of a different grains within the crystalline sample.

A method for determining crystallography of bulk crystal sample comprising:

• providing a sample holder for holding a crystalline sample for characterization of a sample area;
• generating an electron beam;
• controlling the relative movement between the electron beam and the crystalline sample to direct the electron beam at a series of spaced apart points within the sample area;
• generating crystallographic data based upon electron diffraction from the crystalline sample;
• determining whether sufficient data have been acquired to characterize the sample area;
• and
• spacing the points apart such that acquired data is representative of a different grain within the crystalline sample.

A method for determining crystallography of bulk crystal sample comprising:

• providing a sample holder for holding a crystalline sample;
• generating a first ion beam;
• controlling the relative movement between the first ion beam and the crystalline sample, for directing the first ion beam at desired areas of the crystalline sample;
• detecting secondary electrons emitted from the crystalline sample;
• creating a contrast intensity image based upon secondary electron emissions from the crystalline sample;
• providing crystallographic information based on the contrast image intensity data;
• and
• controlling the scanning actuator for scanning the first ion beam.

A method for determining crystallography of bulk crystal sample comprising:

• providing a sample holder for holding a crystalline sample;
• generating a first ion beam;
• generating an electron beam;
• controlling the relative movement between the first ion beam, the electron beam, and the crystalline sample for directing the first ion beam at desired areas of the crystalline sample and for directing the electron beam at a series of points within the sample area;
• detecting secondary electron emissions from the crystalline sample;
• creating a contrast intensity image based upon secondary electron emissions from the crystalline sample and generating crystallographic data based upon electron diffraction from the crystalline sample;
• providing crystallographic information based on the contrast image intensity data and configured for determining whether sufficient data have been acquired to characterize the sample area;
• and
• controlling the scanning actuator to direct the first ion beam at desired areas such that each ion channeling image is representative of channeling directions within the crystalline sample and spacing the points apart such that acquired data is representative of a different grains within the crystalline sample.