Glow discharge drilling apparatus and glow discharge drilling method

A glow discharge drilling apparatus having a first electrode and a second electrode on which a sample is disposed in a drilling processing chamber to which inert gas is supplied, said apparatus drilling the sample by means of a glow discharge generated by supplying electric power to the first electrode and the second electrode, comprising:

• a controller for controlling such that electric power is supplied intermittently;
• and such that electric power is supplied continuously, and capable of switching continuous electric power supply and intermittent electric power supply.

A glow discharge drilling apparatus having a first electrode and a second electrode on which a sample is disposed in a drilling processing chamber to which inert gas is supplied, said apparatus drilling the sample by means of a glow discharge generated by supplying electric power to the first electrode and the second electrode, comprising:

• a controller for controlling such that electric power is supplied intermittently, and capable of changing a state relevant to intermittent electric power supply.

A glow discharge drilling apparatus having a first electrode and a second electrode on which a sample is disposed in a drilling processing chamber to which inert gas is supplied, said apparatus drilling the sample by means of a glow discharge generated by supplying electric power to the first electrode and the second electrode, comprising:

• intermittent electric power supply means for intermittently supplying electric power;
• and
• electric power supply state change means for changing a state relevant to the intermittent electric power supply carried out by the intermittent electric power supply means.

A glow discharge drilling method for disposing a sample to be opposed to an electrode, supplying inert gas, supplying electric power to the electrode and sample to generate a glow discharge, and drilling the sample by the generated glow discharge, said method comprising the steps of:

• surrounding and sealing a space at which the electrode and sample are opposed to each other;
• and
• intermittently supplying electric power in an atmosphere in which inert gas is supplied to the space formed by sealing.

A glow discharge drilling method for supplying inert gas into a drilling processing chamber having a first electrode and a second electrode on which a sample is disposed, supplying electric power to the first electrode and the second electrode to generate a glow discharge, and drilling the sample by the generated glow discharge, said method comprising the step of:

• the intermittent electric power supply step of intermittently supplying electric power, wherein a state relevant to intermittent electric power supply can be changed in the intermittent electric power supply step.

A glow discharge drilling apparatus for drilling a sample by a glow discharge generated by applying a voltage between an electrode and the sample disposed to be opposed to the electrode, said apparatus comprising:

• a measuring section for measuring a drilled depth by carrying out light irradiation to a drilled site and light receiving of reflection light reflected on the drilled site.

A glow discharge drilling apparatus for drilling a sample by a glow discharge generated by applying a voltage between an electrode and the sample disposed to be opposed to the electrode, said apparatus comprising:

• measuring means for measuring a drilled depth by carrying out light irradiation to a drilled site and light receiving of reflection light reflected on the drilled site.

A glow discharge drilling method for drilling a sample by a glow discharge generated by applying a voltage between an electrode and the sample disposed to be opposed to the electrode, said method comprising the steps of:

• measuring a drilled depth by carrying out light irradiation to a drilled site and light receiving of reflection light reflected on the drilled site;
• and
• stopping voltage application and terminate drilling according to the measured drilled depth.

A glow discharge drilling apparatus for drilling a sample by a glow discharge generated by applying a voltage between a hollow electrode and the sample disposed to be opposed to the hollow electrode, said apparatus comprising:

• an infrared ray sensor for receiving an infrared ray radiated from a drilled site of the sample, the infrared ray having passed through a hollow portion of the hollow electrode;
• and
• a temperature measuring section for measuring a temperature of a drilled site of the sample based on the infrared ray received by the infrared ray sensor.

A glow discharge drilling apparatus for drilling a sample by a glow discharge generated by applying a voltage between a hollow electrode and the sample disposed to be opposed to the hollow electrode, said apparatus comprising:

• an infrared ray sensor for receiving an infrared ray radiated from a drilled site of the sample, the infrared ray having passed through a hollow portion of the hollow electrode;
• and
• temperature measuring means for measuring a temperature of a drilled site of the sample based on the infrared ray received by the infrared ray sensor.