Method of fabricating TFT array substrate and metal layer thereof

Abstract

A method of fabricating a TFT array substrate and a metal layer thereof is provided. First, a substrate having a first patterned metal layer disposed thereon is provided, wherein the first patterned metal layer is formed by an electroplating method. Then, a gate insulating layer is formed on the substrate, wherein the gate insulating layer covers the first metal layer. Next, a semiconductive layer is formed on the gate insulating layer over the first metal layer. Then, a patterned second metal layer is formed on the semiconductive layer. The first metal layer, the second metal layer and the semiconductive layer constitute a plurality of thin film transistors, a plurality of scanning lines and a plurality of data lines, wherein the scanning lines and the data lines are coupled to the thin film transistors.

Dependencies are inferred from the claim text.