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US 2006/0231394 A1Published application
Cylindrical AC/DC Magnetron with Compliant Drive System and Improved Electrical and Thermal Isolation
OwnerRichard Barrettinventor
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Abstract
An AC/DC cylindrical magnetron with a drive system that absorbs large variations in the rotation of the target tube, an efficient high capacity electrical transfer system, and improved electrical isolation.
Claims15
An endblock for holding an end of a cylindrical target tube in a cylindrical magnetron sputtering system, comprising:
- a spindle for coupling to the end of the cylindrical target tube;
- an isolation housing extending about the spindle;
- and
- an electrically non-conductive ceramic bearing between the spindle and the isolation housing that allows the spindle to rotate within the isolation housing.
1 more element
A cylindrical magnetron sputtering system, comprising:
- a target tube having target material at an outer cylindrical surface, the target tube extending from a first end to a second end;
- a first endblock holding the first end of the target tube;
- and
- a second endblock holding the second end of the target tube, the second endblock including a spindle that is attached to the target tube, an isolation housing, an electrically non-conductive ceramic bearing that holds the spindle within the isolation housing allowing the spindle and target tube to rotate about an axis, and a non-metallic rotational seal extending between the spindle and the isolation housing.
1 more element
Dependencies are inferred from the claim text.