Portable system for semiconductor manufacturing
AssigneeUVTech Systems, Inc.
InventorsDavid Elliott, Ronald Millman, Murray Tardif, Krista Aiello
Life of this patent
Estimating the term…
Abstract
An automated system for use in semiconductor manufacturing may include a semiconductor reaction chamber, a solid-state laser mounted above a top surface of the semiconductor reaction chamber, and a gas delivery module connected to the semiconductor reaction chamber. The system may include a gas exhaust pump connected to the semiconductor reaction chamber, a temperature sensor connected to the semiconductor reaction chamber, and a housing surrounding the reaction chamber, the solid-state laser, the gas delivery module, the gas exhaust pump, and the temperature sensor, where the housing is portable.
Claims24
An automated system for use in semiconductor manufacturing, the system comprising:
- a semiconductor reaction chamber;
- a solid-state laser mounted above a top surface of the semiconductor reaction chamber;
- a gas delivery module connected to the semiconductor reaction chamber;
- a gas exhaust pump connected to the semiconductor reaction chamber;
- a temperature sensor connected to the semiconductor reaction chamber;
- and
- a housing surrounding the reaction chamber, the solid-state laser, the gas delivery module, the gas exhaust pump, and the temperature sensor, wherein the housing is portable.
A semiconductor processing system, comprising:
- a semiconductor reaction chamber;
- a solid-state laser mounted above a top surface of the semiconductor reaction chamber;
- a gas delivery module connected to the semiconductor reaction chamber;
- a gas exhaust pump connected to the semiconductor reaction chamber;
- and
- a housing surrounding the reaction chamber, the solid-state laser, the gas delivery module, and the gas exhaust pump, wherein the housing has a footprint on the order of 9.6 square feet and wherein the housing, the reaction chamber, the solid-state laser, the gas delivery module, and the gas exhaust pump collectively weigh on the order of 550 pounds.
A portable system that removes residue from a surface of a substrate by converting the residue into a gaseous state via a gas mixture, the portable system comprising:
- a substrate reaction chamber;
- and
- a solid-state radiation source mounted above the reaction chamber, wherein the portable system has a footprint on the order of 9.6 square feet.
A portable substrate cleaning system comprising:
- a substrate reaction chamber;
- a solid-state laser mounted above the substrate reaction chamber;
- a gas delivery module connected to the substrate reaction chamber;
- a gas exhaust pump connected to the substrate reaction chamber;
- and
- a temperature sensor connected to the substrate reaction chamber, the substrate reaction chamber, the solid-state laser, the gas delivery module, the gas exhaust pump, and the temperature sensor collectively weighing less than 550 pounds.
A dry substrate cleaning system comprising:
- a substrate reaction chamber;
- a solid-state laser mounted above a top surface of the substrate reaction chamber;
- a gas delivery module connected to the substrate reaction chamber;
- a gas exhaust pump connected to the substrate reaction chamber;
- and
- a temperature sensor connected to the substrate reaction chamber, the substrate reaction chamber, the solid-state laser, the gas delivery module, the gas exhaust pump, and the temperature sensor collectively weighing less than 550 pounds and collectively having a footprint on the order of 9.6 square feet.
A dry substrate cleaning system comprising:
- a substrate reaction chamber;
- a solid-state laser mounted above a top surface of the substrate reaction chamber;
- a gas delivery module connected to the substrate reaction chamber;
- a gas exhaust pump connected to the substrate reaction chamber;
- a temperature sensor connected to the substrate reaction chamber;
- and
- a housing containing the substrate reaction chamber, the solid-state laser, the gas delivery module, the gas exhaust pump, and the temperature sensor, the housing having a width on the order of 42 inches.
Dependencies are inferred from the claim text.