US 2006/0230815 A1 · Leak-testing technique for differential pressure sensor array

Abstract

A leak-testing technique and apparatus for differential pressure sensor arrays is provided. A reference pressure sensor array is provided, wherein a seal is disposed between the reference pressure sensor array and a target differential pressure sensor array. A probe socket is utilized to communicate with each individual sensor in the reference pressure sensor array. The target pressure sensor array and the reference pressure sensor array are sealed via a pressure plate and plunger assembly. The target pressure sensor array, seal, and reference pressure sensor array are exposed to a first pressure. The target differential pressure sensor array, seal, and reference pressure sensor array are then exposed to a second pressure. The probe socket verifies that all reference pressure sensors continue to output the first pressure. If the probe socket identifies a reference pressure sensor that reads the second pressure, then the corresponding target pressure sensor is identified as being defective because of leakage.

Claims18

Dependent claims

A method for leak-testing a target differential pressure sensor array, comprising:

providing a reference pressure sensor array having a plurality of reference pressure sensors;
sealing said reference pressure sensor array and the target differential pressure sensor array;
subjecting said reference pressure sensor array and the target differential pressure sensor array to a first pressure;
subjecting said reference pressure sensor array and the target differential pressure sensor array to a second pressure after the steps of sealing and subjecting said reference pressure sensor array and the target differential pressure sensor array to a first pressure;
and
measuring an output from each said reference pressure sensor on said reference pressure sensor array after the step of subjecting said reference pressure sensor array and the target differential pressure sensor array to a second pressure.

3 more elements

A method for leak-testing a plurality of target differential pressure sensor arrays, comprising:

providing a plurality of reference pressure sensor arrays having a plurality of reference pressure sensors;
sealing said plurality of reference pressure sensor arrays and the plurality of target differential pressure sensor arrays;
subjecting said plurality of reference pressure sensor arrays and the plurality of target differential pressure sensor arrays to a first pressure;
subjecting said plurality of reference pressure sensor arrays and the plurality of target differential pressure sensor arrays to a second pressure after the steps of sealing and subjecting said plurality of reference pressure sensor arrays and the plurality of target differential pressure sensor arrays to a first pressure;
and
measuring an output from each said reference pressure sensor on said plurality of reference pressure sensor arrays after the step of subjecting said plurality of reference pressure sensor arrays and the plurality of target differential pressure sensor arrays to a second pressure.

3 more elements

Dependencies are inferred from the claim text.

Leak-testing technique for differential pressure sensor array

Life of this patent

Leak-testing technique for differential pressure sensor array

Life of this patent

Abstract

Claims18