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US 2006/0226765 A1Published application
Electronic emitters with dopant gradient
OwnerDavid Catheyinventor
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Abstract
Electron emitters and a method of fabricating emitters are disclosed, having a concentration gradient of impurities, such that the highest concentration of impurities is at the apex of the emitters and decreases toward the base of the emitters. The method comprises the steps of doping, patterning, etching, and oxidizing the substrate, thereby forming the emitters having impurity gradients.
Claims10
A field emission site, comprising:
- an electron emitter having a base and an apex and defining a decreasing range of widths from said base to said apex;
- a dopant in said emitter having a density generally inversely proportional to said range of widths;
- and
- a generally undoped film under said electron emitter.
1 more element
A field emission site, comprising:
- a generally pure substrate;
- and
- a cathode on said substrate having an apex and a base and defining an increasing range of widths from said apex to said base and having a purity generally directly proportional to said range of widths.
A cathode conductor system, comprising:
- a tip further comprising:
- an apex, and
- a base under said apex;
- a substrate indivisibly extending from said base;
- and
- a dopant in said tip defining a concentration gradient from said apex to said base and further defining a uniform concentration under said base.
3 more elements
An electron-source site, comprising:
- a film having a generally constant first conductivity;
- and
- an emitter over said film, having a base and an apex, and further having a plurality of conductivities including a low conductivity at said base and a high conductivity at said apex.
Dependencies are inferred from the claim text.