Method and apparatus for selective deposition of materials to surfaces and substrates

A method for selective deposition to a feature surface or deposition surface, comprising:

• providing a substrate or material having feature patterns and/or a deposition surface disposed in an operable thermal relationship with a heat source(s);
• providing a precursor comprising a deposition material releasable at a release temperature or condition for said precursor;
• exposing said substrate to said solvent and said precursor at liquid, near-critical, or supercritical conditions for said solvent;
• heating said substrate with said source(s) generating a temperature gradient in said features;
• and
• whereby said deposition material is released from said precursor at said release temperature or condition for said precursor and selectively deposited in said features and/or to said deposition surface in response to said temperature gradient substantially filling said feature pattern(s) or a portion thereof and controlling the location of said deposition material in said feature(s) and/or to said deposition surface.

A system for selective deposition, comprising:

• a chamber for staging a substrate having a deposition surface;
• a delivery system for delivering a solvent and a precursor miscible in said solvent at a liquid, near-critical, or supercritical temperature for said solvent, said precursor comprising a deposition material releasable to said surface at a release temperature for said precursor;
• a heat source(s) for heating said substrate, said surface of said substrate disposed in an operable thermal relationship with said heat source(s) for generating a temperature gradient at, in, on, through, or along said surface;
• and
• wherein heating of said substrate releases said deposition material at said release temperature from said precursor whereby said deposition material is selectively deposited to said surface in response to said temperature gradient thereby controlling location and/or thickness of said deposition material at, on, in, or along said surface.