Semiconductor devices having improved field plates

A method for forming a field effect transistor, comprising:

• forming source, drain, and gate metal contacts to a semiconductor;
• forming a dielectric layer over the formed source, drain, and gate metal contacts;
• forming a first mask over the dielectric layer, such first mask having a window therein disposed over a portion of the dielectric layer to expose an underlying portion of the dielectric layer, such exposed portion of the dielectric layer being disposed over a portion of the gate metal contact;
• applying a dry etch to the first mask to remove portions of the dielectric layer exposed by the window to expose the portion of the gate metal contact, remaining portions of the dielectric being left over an edge region of the gate metal contact;
• removing the first mask;
• forming a second mask over the remaining portions of the dielectric layer, such second mask having a window therein disposed over portions of the gate metal contact and over the portions of the dielectric left over the edge region of the gate metal contact;
• forming a field plate metal through the window in the second mask, such field plate:
• being electrically connected to the exposed portion of the gate metal contact;
• being separated the edge region of the gate metal contact by the portions of the dielectric left over the edge region;
• and, extending beyond the edge of the gate metal contact towards the drain metal contact.