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US 2006/0223291 A1Published application
Method and apparatus for producing a MEMS device
AssigneeAnalog Devices, Inc.
InventorsThomas Chen, Michael Judy
Life of this patent
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Abstract
A method of producing a MEMS device provides an apparatus having structure on a first layer that is proximate to a substrate. The apparatus has a space proximate to the structure. The method adds doped material to the space. The doped material dopes at least a portion of the first layer.
Claims20
A method of producing a MEMS device, the method comprising:
- providing an apparatus having structure on a first layer that is proximate to a substrate, the apparatus having a space proximate to the structure;
- and
- adding doped material to the space, the doped material doping at least a portion of the first layer.
A method of producing a MEMS device, the method comprising:
- providing an intermediate multi-layer apparatus having an insulator layer between a first layer and a substrate, the first layer having structure;
- and
- positioning a doped material through at least a portion of the first layer, the doped material doping at least a portion of the first layer.
A method of producing a MEMS device, the method comprising:
- providing an intermediate multi-layer apparatus having an insulator layer between a first layer and a substrate, the first layer having structure, the structure being unreleased relative to the substrate;
- and
- releasing the structure, releasing comprising removing a portion of the substrate.
Dependencies are inferred from the claim text.