Method of manufacturing a semiconductor memory device

Abstract

A method of manufacturing a semiconductor device comprises providing a semiconductor substrate, forming trenches in predetermined regions of the semiconductor substrate, forming isolation structures within the trenches that separate active regions and field regions of the device, and etching exposed regions of the semiconductor substrate so that the exposed regions of possess a curved surface. In a specific embodiment of the invention, an oxidization process is performed to compensate for damage on the exposed regions of the semiconductor substrate after etching the semiconductor substrate, and a wet etch process is performed to remove an oxide layer grown by the oxidization process. In a specific embodiment of the invention, the etch process may comprise a wet or dry etch process.

Dependencies are inferred from the claim text.