Schottky junction diode devices in CMOS with multiple wells
AssigneeImpinj, Inc.
InventorsYanjun Ma, Ronald Oliver, Todd Humes, Jaideep Mavoori
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AssigneeImpinj, Inc.
InventorsYanjun Ma, Ronald Oliver, Todd Humes, Jaideep Mavoori
Estimating the term…
A Schottky junction diode device having improved performance and a multiple well structure is fabricated in a conventional CMOS process. A substrate including a material doped to a first conductivity type is formed. A first well is disposed over the substrate. The first well includes a material doped differently, such as to a second conductivity type opposite that of the first conductivity type. A second well is disposed within the first well. A region of metal-containing material is disposed in the second well to form a Schottky junction at an interface between the region of metal-containing material and the second well. In one embodiment, a second well contact is disposed in a portion of the second well.
A Schottky junction diode device comprising:
A method for manufacturing a Schottky junction diode device comprising:
Dependencies are inferred from the claim text.