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US 2006/0223243 A1Published application
Carbon nanotube - metal contact with low contact resistance
OwnerMarko Radosavljevic, Justin Brask +3inventors
InventorsMarko Radosavljevic, Justin Brask, Suman Datta, Amlan Majumdar, Robert Chau
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Abstract
A metal to Carbon nanotube contact region is described that comprises a chemical bond between the metal and the Carbon nanotube.
Claims24
A method, comprising:
- decreasing the resistance of a metal to Carbon nanotube contact region by treating said contact region with an oxidizing agent solution having a pH level within a range of 6.0 to 8.0 inclusive.
An apparatus comprising:
- a metal to Carbon nanotube contact region comprising a chemical bond between said metal and said Carbon nanotube.
A transistor, comprising:
- a source electrode comprising metal;
- a channel comprising a Carbon nanotube;
- and,
- a contact region between said metal and said Carbon nanotube comprising a chemical bond between said metal and said Carbon nanotube.
1 more element
A method, comprising:
- decreasing the resistance of a metal to Carbon nanotube contact region by treating said contact region with an oxidizing agent solution having a pH level within a range of 4.0 to 10.0 inclusive.
Dependencies are inferred from the claim text.