US 2006/0223171 A1 · High sensitivity mechanical resonant sensor

Abstract

A system and method for detecting mass based on a frequency differential of a resonating micromachined structure, such as a cantilever beam. A high aspect ratio cantilever beam is coated with an immobilized binding partner that couples to a predetermined cell or molecule. A first resonant frequency is determined for the cantilever having the immobilized binding partner. Upon exposure of the cantilever to a solution that binds with the binding partner, the mass of the cantilever beam increases. A second resonant frequency is determined and the differential resonant frequency provides the basis for detecting the target cell or molecule. The cantilever may be driven externally or by ambient noise. The frequency response of the beam can be determined optically using reflected light and two photodetectors or by interference using a single photodetector.

Claims47

Dependent claims

An array of detectors comprising:

a plurality of resonant structures, each resonant structure having a mass, an immobilized portion and a resonant portion, wherein each immobilized portion is fixed to a substrate and wherein each resonant portion resonates under ambient conditions at a frequency based on the mass;
a plurality of binding partners on at least one resonant portion, wherein each binding partner binds to a predetermined analyte;
and
a sensor responsive to a particular resonant portion selected from the plurality of resonant structures, wherein said sensor generates an output signal based on a resonant frequency of the particular resonant portion.

1 more element

Dependencies are inferred from the claim text.

High sensitivity mechanical resonant sensor

Life of this patent

High sensitivity mechanical resonant sensor

Life of this patent

Abstract

Claims47