Discrete track media and method of manufacturing the same
AssigneeKabushiki Kaisha Toshiba
InventorsYoshiyuki Kamata, Masatoshi Sakurai, Shinobu Sugimura, Satoshi Shirotori
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Abstract
A discrete track media has a nonmagnetic substrate, and a magnetic recording layer provided on the nonmagnetic substrate and having a data region including a recording track and a servo region including a preamble zone, an address zone and a burst zone, the data region and the servo region include patterns of a ferromagnetic layer forming protrusions and a nonmagnetic material filled into recesses between the patterns of the ferromagnetic layer, in which a height of the nonmagnetic material filled into the recesses in the data region is lower than that in the burst zone.
Claims14
A discrete track media comprising:
- a nonmagnetic substrate;
- and
- a magnetic recording layer provided on the nonmagnetic substrate and comprising a data region including a recording track and a servo region including a preamble zone, an address zone and a burst zone, the data region and the servo region include patterns of a ferromagnetic layer forming protrusions and a nonmagnetic material filled into recesses between the patterns of the ferromagnetic layer,
- wherein a height of the nonmagnetic material filled into the recesses in the data region is lower than that in the burst zone.
A method of manufacturing a discrete track media, comprising:
- forming a ferromagnetic layer and a protective layer on a nonmagnetic substrate;
- applying a resist to the protective layer;
- imprinting a stamper, having patterns of protrusions and recesses corresponding to a recording track, a preamble zone, an address zone and a burst zone, onto the resist so as to transfer the patterns to the resist;
- carrying out dry-etching to selectively remove bottoms of the recesses in the resist to which the patterns of the protrusions and recesses have been transferred;
- ion-beam etching the protective layer and the ferromagnetic layer using the patterned resist as a mask;
- carrying out sputtering to fill a nonmagnetic material into the recesses between patterns of the ferromagnetic layer with the patterned resist remained on the protective layer;
- and
- performing etchback to reduce a thickness of the nonmagnetic material.
Dependencies are inferred from the claim text.