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US 2006/0222895 A1Published application
Piezoelectric film laminate and method of manufacturing the same
AssigneeSeiko Epson Corporation
InventorsTakamitsu Higuchi, Takeshi Kijima, Mayumi Ueno
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Abstract
A piezoelectric film laminate including a sapphire substrate and a lead zirconate titanate niobate film and a potassium niobate film formed on the sapphire substrate.
Claims20
A piezoelectric film laminate, comprising a lead zirconate titanate niobate film and a potassium niobate film stacked on the lead zirconate titanate niobate film.
A method of manufacturing a piezoelectric film laminate, comprising:
- providing a sapphire substrate;
- providing a precursor composition including a precursor for forming a lead zirconate titanate niobate film, the precursor including at least niobium, titanium, and zirconium and having a partial ester bond;
- applying the precursor composition to the sapphire substrate and heating the applied precursor composition to form a lead zirconate titanate niobate film;
- and
- forming a potassium niobate film on the lead zirconate titanate niobate film.
2 more elements
Dependencies are inferred from the claim text.