Potassium niobate deposited body and method for manufacturing the same, piezoelectric thin film resonator, frequency filter, oscillator, electronic circuit, and electronic apparatus
AssigneeSeiko Epson Corporation
InventorsTakamitsu Higuchi, Takeshi Kijima, Mayumi Ueno
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Abstract
A potassium niobate deposited body includes an R-plane sapphire substrate, a buffer layer composed of a metal oxide and formed above the R-plane sapphire substrate, a lead zirconate titanate niobate layer formed above the buffer layer, a potassium niobate layer or a potassium niobate solid solution layer formed above the lead zirconate titanate niobate layer, an electrode layer formed above the potassium niobate layer or the potassium niobate solid solution layer, and another substrate formed above the electrode layer.
Claims20
A potassium niobate deposited body comprising:
- an R-plane sapphire substrate;
- a buffer layer composed of a metal oxide and formed above the R-plane sapphire substrate;
- a lead zirconate titanate niobate layer formed above the buffer layer;
- a potassium niobate layer or a potassium niobate solid solution layer formed above the lead zirconate titanate niobate layer;
- an electrode layer formed above the potassium niobate layer or the potassium niobate solid solution layer;
- and
- another substrate formed above the electrode layer.
A potassium niobate deposited body comprising:
- a substrate;
- an electrode layer formed above the substrate;
- a potassium niobate layer or a potassium niobate solid solution layer formed above the electrode layer;
- and
- a lead zirconate titanate niobate layer formed above the potassium niobate layer or the potassium niobate solid solution layer.
Dependencies are inferred from the claim text.