Miniature chemical analysis system
AssigneeIntel Corporation
InventorsLi-Peng Wang, Qing Ma
Life of this patent
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Abstract
An apparatus, according to one aspect, may include a chromatograph and a bulk acoustic resonator. The chromatograph may include a channel that is defined at least partially in a monolithic substrate. The channel may have an inlet to receive a sample and an outlet. A chromatography material may be included in the channel. The bulk acoustic resonator may have a first electrode and a second electrode that has a chemically functionalized surface. The chemically functionalized surface may be included in a chamber that is defined at least partially in the monolithic substrate and that is coupled with the outlet of the channel. Methods of making and using such apparatus, and systems including such apparatus, are also disclosed.
Claims20
An apparatus comprising:
- a chromatograph including a channel that is defined at least partially in a monolithic substrate, the channel having an inlet to receive a sample and an outlet, and the chromatograph including a chromatography material in the channel;
- and
- a bulk acoustic resonator having first electrode and a second electrode that has a chemically functionalized surface that is included in a chamber, wherein the chamber is defined at least partially in the monolithic substrate and is coupled with the outlet of the chromatograph.
An apparatus comprising:
- a chromatograph including a channel that is defined at least partially in a piece of single crystal silicon, the channel having an inlet to receive a sample, the channel having a material therein to affect progression of chemical species of the sample through the channel, and the channel having an outlet;
- one or more metal traces positioned relative to the chromatograph to heat the material in the channel;
- and
- a film bulk acoustic resonator (FBAR) detector, the FBAR detector including a first electrode, a second electrode having a coated surface, and a piezoelectric material disposed between the first and second electrodes, the FBAR detector further including a chamber that is defined at least partially in the piece of single crystal silicon, the chamber having an inlet that is coupled with the outlet of the chromatograph to receive the chemical species, wherein the coated surface of the second electrode is exposed to the chemical species received into the chamber.
A method comprising:
- forming a channel of a chromatograph at least partially in a monolithic substrate by removing material of the monolithic substrate;
- forming a chamber of a bulk acoustic resonator at least partially in the monolithic substrate by removing material of the monolithic substrate over an electrode of the bulk acoustic resonator;
- introducing a chromatography material into the channel of the chromatograph;
- and
- chemically functionalizing a surface of the electrode of the bulk acoustic resonator by coupling a material therewith.
A system comprising:
- a chemical analysis system including:
- a chromatograph including a channel that is defined at least partially in a monolithic substrate, the channel having an inlet to receive a sample and an outlet, and the chromatograph including a chromatography material in the channel;
- a bulk acoustic resonator having first electrode and a second electrode that has a chemically functionalized surface that is included in a chamber, wherein the chamber is defined at least partially in the monolithic substrate and is coupled with the outlet of the channel;
- and
- a Flash memory coupled with the chemical analysis system to store data.
Dependencies are inferred from the claim text.