Substrate transport apparatus with active edge gripper
AssigneeBrooks Automation, Inc.
InventorsMichael Duhamel, Richard Pickreign
Life of this patent
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Abstract
A substrate transport apparatus comprising a drive mechanism, a movable arm assembly, and an end effector with an active edge gripper. The apparatus is configured to avoid the need to provide cables to the end effector for power or communication. In one aspect, the gripper is actuated when a motion sensor senses motion of the end effector. In another aspect, communication signals are wirelessly transferred to the end effector to control the active gripper. In another aspect, power is wirelessly transferred to the end effector to power actuation of the gripper.
Claims23
A substrate transport apparatus comprising:
- a drive mechanism;
- a movable arm assembly connected to the drive mechanism;
- an end effector connected to the movable arm assembly;
- a chuck for holding a substrate, the chuck being mounted on the end effector and having a movable edge gripper with a contact surface, wherein an edge of the substrate is gripped by actuating the movable edge gripper to engage the substrate with the contact surface;
- and
- a motion sensor for providing a signal to actuate the movable edge gripper;
- and
- wherein the movable edge gripper is actuated in response to the motion sensor sensing motion of the end effector.
A substrate processing apparatus comprising:
- a chamber capable of holding an isolated atmosphere;
- a drive mechanism connected to the chamber;
- a movable arm assembly connected to the drive mechanism and mounted within the chamber, the movable arm assembly having an end effector, with a chuck, for holding a substrate, the chuck having a movable edge gripper with a contact surface, wherein an edge of the substrate is gripped by actuating the movable edge gripper to engage the substrate with the contact surface;
- and
- a wireless communication device mounted to the movable arm assembly, operatively connected to the movable edge gripper and capable of actuating the movable edge gripper in response to a signal received from another wireless communication device.
A substrate processing apparatus comprising:
- a chamber capable of holding an isolated atmosphere;
- a drive mechanism connected to the chamber;
- a movable arm assembly connected to the drive mechanism and mounted within the chamber, the movable arm assembly having an end effector with a chuck for holding a substrate, the chuck having a movable edge gripper with a contact surface, wherein an edge of the substrate is gripped by actuating the movable edge gripper to engage the substrate with the contact surface;
- and
- a wireless communication device mounted to the movable arm assembly and operably connected to the end effector wherein the wireless communication device is capable of converting a wireless signal to power powering actuation of the movable edge gripper.
Dependencies are inferred from the claim text.