Articulated MEMs structures
AssigneeJDS Uniphase Corporation
InventorsMohiuddin Mala, Barrie Keyworth, John Miller, Thomas Ducellier, Graham McKinnon
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Abstract
The present invention relates to an articulated micro-electro-mechanical (MEMS) device, which is constructed in such a way as to enable several of the devices to be closely packed together, i.e. high fill factor, for redirecting specific wavelengths of light from a dispersed optical signal to different output ports. The articulated MEMS device includes multiple pivotally connected sections that are pivotable about two perpendicular axes for limiting the amount of dynamic cross-talk as the device is rotated between different positions.
Claims20
An articulated micro-electro-mechanical device suspended above a substrate comprising:
- a main platform having a longitudinal axis pivotable about first and second perpendicular axes;
- a first moveable actuator, one end of which is pivotally connected to the main platform, for pivoting the main platform about the first axis;
- a first actuating means for moving the first moveable actuator, thereby pivoting the main platform about the first axis;
- and
- a second actuating means for pivoting the main platform about the second axis.
Dependencies are inferred from the claim text.