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US 2006/0222235 A1Published application
Defect inspection method
OwnerKenshi Kanegaeinventor
Life of this patent
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Abstract
By irradiating a substrate to be inspected with an energy beam, the energy beam reflected from the substrate to be inspected is obtained as a digital image signal. When the intensity of the obtained digital image signal exceeds a threshold, the digital image signal is detected as a defect. The threshold is set based on the maximum intensity of a noise signal included in the digital image signal.
Claims13
A defect inspection method comprising the steps of:
- irradiating a substrate to be inspected with an energy beam to obtain the energy beam reflected from the substrate to be inspected as a digital image signal;
- and
- detecting the digital image signal as a defect when an intensity of the obtained digital image signal exceeds a threshold, wherein
- the threshold is set based on a maximum intensity of a noise signal included in the digital image signal.
1 more element
A defect inspection method comprising the steps of:
- irradiating a substrate to be inspected with an energy beam to obtain the energy beam reflected from the substrate to be inspected as a digital image signal;
- and
- detecting the digital image signal as a defect when an intensity of the obtained digital image signal exceeds a threshold, the defect inspection method further comprising:
- a sampling inspection step of performing a sampling inspection with respect to a specified inspected region of the substrate to be inspected and setting the threshold based on a maximum intensity of a noise signal included in the digital image signal obtained as a result of the sampling inspection;
- and
- a main inspection step of performing a main inspection with respect to the substrate to be inspected and detecting the digital image signal as a defect when the intensity of the digital image signal obtained as a result of the main inspection exceeds the threshold set in the sampling inspection step.
3 more elements
Dependencies are inferred from the claim text.