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US 2006/0222049 A1Published application
Substrate based temperature sensing
AssigneeAndigilog, Inc.
InventorDavid Cave
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Abstract
A method for providing accurate temperature sensing of a substrate utilizing the PN junction of a transistor formed on the substrate is described.
Claims4
A method of accurately sensing the temperature of a substrate having a sensing transistor formed therein, comprising:
- providing a first emitter drive current, IE1;
- recording a first base current, IB1;
- recording a first base emitter voltage, Vbe1;
- determining a base current, MIB1, M being a predetermined multiple;
- providing an emitter drive current, MIE1;
- recording the base current, IB2, resulting from said emitter drive current;
- provide a second emitter drive current that is the summation of IB2−MIB1 and MIE1;
- recording a second base emitter voltages Vbe2
- determining ΔVbe=Vbe2−Vbe1;
- computing the junction temperature of said sensing transistor by utilizing ΔVbe.
7 more elements
A method of accurately sensing the temperature of a substrate having a sensing transistor formed therein, comprising:
- providing a first voltage to the emitter of said transistor;
- current driving the base of said transistor with a first current, IB1;
- measuring a first base emitter voltage, Vbe1;
- current driving the base of said transistor with a second current IB2 such that IB2/IB1=M;
- measuring a first base emitter voltage, Vbe2;
- and
- determining the temperature utilizing the relationship
- ΔVbe=ηKT/q ln IB2/IB1.
5 more elements
An arrangement for measuring the temperature of a substrate, comprising:
- a sensing transistor on said substrate;
- a sensing and control circuit coupled to said transistor, said sensing and control circuit operating said transistor under first drive conditions to produce a first response and operating said transistor under second drive conditions having a predetermined relationship to said first drive conditions to produce a second response, said sensing and control circuit utilizing said first and said second responses in accordance with a predetermined algorithm to determine the temperature of said substrate.
Dependencies are inferred from the claim text.