Method and system for indirect determination of local irradiance in an optical system
AssigneeCarl Zeiss SMT GmbH
InventorsFrank Melzer, Axel Scholz
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Abstract
The invention concerns a method for the indirect determination of local irradiance in an optical system; wherein the optical system comprises optical elements between which an illuminated beam path is formed and a measurement object which absorbs the radiation in the beam path at least partially is positioned in a partial region of the beam path selected for the locally-resolved determination of the irradiance and the temperature distribution of at least one part of the measurement object is determined by means of a temperature detector.
Claims21
A method for the indirect determination of local irradiance in an optical system;
- the optical system comprises optical elements between which a beam path is formed;
- a measurement object which absorbs the radiation in beam path at least partially is positioned at a partial region of beam path selected for the locally-resolved determination of irradiance;
- the temperature distribution of at least a part of the measurement object is determined by means of a temperature detector.
An optical system;
- with optical elements between which is formed an illuminated beam path;
- with a temperature detector for measuring the temperature distribution of at least one partial region of a measurement object absorbing the radiation in the beam path at least partially.
Dependencies are inferred from the claim text.