Alumina tube
AssigneeNGK Insulators, Ltd.
InventorMitsuru Ohta
Life of this patent
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Abstract
An excimer laser includes: an alumina tube which has a purity of 99.9% by weight or more, a density of 3.99 g/cm3 or more, an open porosity of less than 0.3%, and a dielectric strength voltage of 15 kV/mm or more and which includes a hollow portion; an inner electrode for corona discharge which is disposed in the hollow portion of the alumina tube; and an outer electrode for corona discharge which is disposed so as to contact an outer circumferential surface of the alumina tube.
Claims5
An alumina tube which has a purity of 99.9% by weight or more, a density of 3.99 g/cm3 or more, an open porosity of less than 0.3%, and a dielectric strength voltage of 15 kV/mm or more, and comprises a hollow portion in which an inner electrode for corona discharge is disposed.
Dependencies are inferred from the claim text.