Cleaning method and cleaner device for laminated substrate fabrication apparatus
AssigneeFujitsu Limited
InventorsTakanori Muramoto, Tetsuji Kadowaki, Yukio Takayama, Ken Tsuboi
Life of this patent
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Abstract
A method for cleaning a laminated substrate fabrication apparatus that efficiently cleans a surface used to attract a substrate while enabling stable cleaning. A cleaning unit, which includes an attraction surface for attracting and holding the substrate, is arranged in a processing chamber to clean the attraction surface.
Claims20
A method for cleaning an attraction surface of a laminated substrate fabrication apparatus in a processing chamber, wherein the laminated substrate fabrication apparatus laminates a plurality of substrates and includes the attraction surface for attracting and holding one of the substrates in the processing chamber, the method comprising the steps of:
- arranging a cleaning unit in the processing chamber;
- and
- cleaning the attraction surface with the cleaning unit in the processing chamber.
A cleaning unit for cleaning an attraction surface of a laminated substrate fabrication apparatus in a processing chamber, wherein the laminated substrate fabrication apparatus laminates a plurality of substrates in the processing chamber and includes the processing chamber and the attraction surface for attracting and holding one of the substrates in the processing chamber, the cleaning unit comprising:
- a cleaning component for cleaning the attraction surface in the processing chamber;
- and
- a mechanism for arranging the cleaning component in the processing chamber.
A cleaner device for cleaning an attraction surface of a laminated substrate fabrication apparatus, which laminates a plurality of substrates in a processing chamber, the laminated substrate fabrication apparatus including the processing chamber and the attraction surface for attracting and holding one of the substrates in the processing chamber, the cleaner device comprising:
- a guide mechanism arranged on the laminated substrate fabrication apparatus;
- and
- a cleaning unit to be placed in the processing chamber and for cleaning the attraction surface in the processing chamber, the cleaning unit being movable along the guide mechanism.
Dependencies are inferred from the claim text.